Coplanar waveguide structures with alternating wide and narrow portions having different thicknesses, method of manufacture and design structure

摘要

On-chip high performance slow-wave coplanar waveguide structures, method of manufacture and design structures for integrated circuits are provided herein. The structure includes at least one ground and signal layer provided in a same plane as the at least one ground. The signal layer has at least one alternating wide portion and narrow portion with an alternating thickness. The wide portion extends toward the at least one ground.

主权项

1. A structure, comprising:
at least one ground; and a signal layer provided in a same plane as the at least one ground, the signal layer having at least one alternating wide portion and narrow portion with an alternating thickness, the wide portion extending toward the at least one ground, wherein the narrow portion has a first thickness T1 and the wide portion has a second thickness T2, wherein T1