Inspection system

摘要

A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical system, which provides a light-optical beam path 5; and a controller 60, wherein the light-optical system comprises at least one light-optical lens 30 arranged in the light-optical beam, which comprises a first lens surface facing the object plane which has two lens surfaces 34, 35 and a through hole 32, wherein the particle-optical system comprises a beam deflection device 23, in order to scan a primary particle beam 15 over a part of the sample plane 19, and wherein the controller is configured to control the beam deflection device 23 in such a manner that a deflected primary particle beam 15 intersects an optical axis 3 of the particle-optical beam path in a plane which is arranged inside the through hole.

主权项

1. A combined inspection system comprising:
a light-optical system configured to provide a light-optical beam path and comprising a light-optical lens arranged in the light-optical beam path, wherein the light-optical lens includes a first lens surface facing towards a sample plane, a second lens surface facing away from the sample plane and a through hole; a particle-optical system configured to provide a particle-optical beam path such that the particle-optical beam path traverses the through hole of the light-optical lens, wherein the particle-optical system comprises a beam deflection device configured to scan a primary particle beam over a portion of a sample plane; and a controller configured to control the beam deflection device such that the deflected primary particle beam intersects an optical axis of the particle-optical beam path in a plane arranged at a distance from both the first lens surface and the second lens surface which is smaller than 1.0 times a distance between the first lens surface and the second lens surface.