发明名称 METHOD FOR PRODUCING n-TYPE SiC MONOCRYSTAL
摘要 Provided is a method for manufacturing an n-type SiC single crystal, the method being able to suppress the variation in nitrogen concentration among a plurality of n-type SiC single crystal ingots manufactured. A method for manufacturing an n-type SiC single crystal in the present embodiment includes the steps of: providing a manufacturing apparatus (100) including a chamber (1) having an area in which a crucible (7) is to be disposed; heating the area in which the crucible (7) is to be disposed and evacuating the gas in the chamber (1); filling, after the evacuation, the chamber (1) with a mixed gas containing a noble gas and nitrogen gas; heating and melting a starting material housed in the crucible (7) disposed in the area to produce a SiC solution (8) containing silicon and carbon; and immersing a SiC seed crystal into the SiC solution under the mixed gas atmosphere to grow an n-type SiC single crystal on the SiC seed crystal.
申请公布号 EP2639344(A4) 申请公布日期 2014.06.25
申请号 EP20110840494 申请日期 2011.11.04
申请人 NIPPON STEEL & SUMITOMO METAL CORPORATION 发明人 KUSUNOKI, KAZUHIKO;KAMEI, KAZUHITO;YASHIRO, NOBUYOSHI;MORIGUCHI, KOUJI;OKADA, NOBUHIRO;DANNO, KATSUNORI;DAIKOKU, HIRONORI
分类号 C30B29/36;C30B19/00 主分类号 C30B29/36
代理机构 代理人
主权项
地址