| 摘要 |
<p>Method and apparatus for controlling and/or measuring a pressure in a chamber. The method comprises providing a sealed package having a first deformable wall, providing a measurement head having an inner wall defining a cavity having an opening substantially extending in a measurement plane, abutting the opening against the first deformable wall such that the chamber is formed bounded by the inner wall and a region of the first deformable wall, providing a distance determining device for determining a distance to a predetermined point on the first deformable wall in said region along a direction substantially perpendicular to the measurement plane, and controlling an inflow of fluid to and/or an outflow of fluid from the chamber on the basis of the determined distance such that a pressure is obtained in the chamber that is substantially equal to the pressure prevailing in the package.</p> |
