| 摘要 |
PURPOSE: A coating apparatus, a coating method thereof, and a storage medium are provided to suppress a mark by preventing the change of an air current on the surface of a substrate even though the thickness of a layer is thin. CONSTITUTION: A substrate holding unit maintains a substrate horizontally and rotates around the vertical axis. A cover unit(4) includes an upper plate(41) facing the substrate while making an empty part in an upper side of the substrate. The cover unit rotates around the vertical axis freely and is larger than the substrate. A lift unit lifts the cover unit in comparison with the substrate holding unit. A coating liquid nozzle(6) supplies the coating liquid including a component of a coating layer and a solvent to the surface of the substrate. A controller(8) controls the operations of the substrate holding unit, the cover unit, and the lift unit. |
