静电吸盘及其制造方法,申请号TW098110146-传众专利搜索

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发明名称	静电吸盘及其制造方法
摘要
申请公布号	TWI442501	申请公布日期	2014.06.21
申请号	TW098110146	申请日期	2009.03.27
申请人	东京威力科创股份有限公司日本	发明人	肥田刚;山本高志
分类号	H01L21/67;H01L21/31	主分类号	H01L21/67
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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