用于扫描束离子植入器之产能增进,申请号TW096129948-传众专利搜索

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发明名称	用于扫描束离子植入器之产能增进
摘要
申请公布号	TWI442459	申请公布日期	2014.06.21
申请号	TW096129948	申请日期	2007.08.14
申请人	艾克塞利斯科技公司美国	发明人	爱德华Ｃ　爱斯纳;波Ｈ　范德贝尔格
分类号	H01L21/265;H01L21/67	主分类号	H01L21/265
代理机构		代理人	桂齐恒台北市中山区长安东路2段112号9楼;阎启泰台北市中山区长安东路2段112号9楼
主权项
地址	美国

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