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发明名称
决定将形貌变化影响模型化之光学微影制程模型之方法及设备
摘要
申请公布号
TWI442254
申请公布日期
2014.06.21
申请号
TW098126261
申请日期
2009.08.04
申请人
希诺皮斯股份有限公司 美国
发明人
黄振声;梅尔文 劳伦斯三世
分类号
G06F17/50;H01L21/027
主分类号
G06F17/50
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
美国
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