托盘式基板搬送系统、成膜方法及电子装置之制造方法,申请号TW100104210-传众专利搜索

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发明名称	托盘式基板搬送系统、成膜方法及电子装置之制造方法
摘要
申请公布号	TWI442505	申请公布日期	2014.06.21
申请号	TW100104210	申请日期	2011.02.09
申请人	佳能安内华股份有限公司日本	发明人	松井雅浩
分类号	H01L21/677	主分类号	H01L21/677
代理机构		代理人	林志刚台北市中山区南京东路2段125号7楼
主权项
地址	日本

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