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发明名称
照明用光源及使用它的图案检查装置
摘要
申请公布号
TWI442016
申请公布日期
2014.06.21
申请号
TW098104058
申请日期
2009.02.09
申请人
牛尾电机股份有限公司 日本
发明人
野本宪太郎;松田僚三
分类号
G01B11/30;G01N21/88;F21S4/00;F21Y101/02
主分类号
G01B11/30
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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