具有介电质气隙之内连线结构,申请号TW096123868-传众专利搜索

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发明名称	具有介电质气隙之内连线结构
摘要
申请公布号	TWI442512	申请公布日期	2014.06.21
申请号	TW096123868	申请日期	2007.06.29
申请人	万国商业机器公司美国	发明人	杨智超
分类号	H01L21/768	主分类号	H01L21/768
代理机构		代理人	蔡坤财台北市中山区松江路148号11楼;李世章台北市中山区松江路148号11楼
主权项
地址	美国

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