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摘要
申请公布号
TWI442481
申请公布日期
2014.06.21
申请号
TW097140305
申请日期
2008.10.21
申请人
半导体能源研究所股份有限公司 日本
发明人
细谷邦雄;藤川最史;千叶阳子
分类号
H01L21/336;H01L21/027
主分类号
H01L21/336
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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