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发明名称
垂直式单电晶体无电容式动态随机存取记忆单元及其制造方法
摘要
申请公布号
TWI442517
申请公布日期
2014.06.21
申请号
TW100115020
申请日期
2011.04.29
申请人
国立中山大学 高雄市西子湾莲海路70号
发明人
林吉聪;陈钲欣
分类号
H01L21/8239;H01L27/108
主分类号
H01L21/8239
代理机构
代理人
蔡东贤 台北市松山区敦化北路201号7楼
主权项
地址
高雄市西子湾莲海路70号
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