| 摘要 |
<p>Disclosed is a support pin assembly for a baking apparatus. According to the present invention, the support pin assembly for a baking apparatus includes a support portion used in a baking process of semiconductors and supporting the base of a substrate from the bottom; a fixing portion coupled to the bottom of the support portion; and a joining portion for mutually connecting the support portion and fixing portion. According to the present invention, the support pin assembly is not an integrated body, and the support portion and fixing portion are made of different material while being coupled by the joining portion. Therefore, when an impact occurs during the baking process, a lower part of the support portion is damaged first, thus effectively preventing the substrate from being damaged by an upper end part of the support portion.</p> |
