| 摘要 |
<p>The present invention relates to an apparatus for manufacturing a solar cell and a control method thereof which enable a metalized film to have a regular physical property in case of manufacturing the solar cell by using a metalizing process for a flexible substrate. To attain the purpose, the present invention includes a process chamber having a space where the metalizing process is performed; a rotary drum arranged within the process chamber for supporting the substrate; a gas supply part arranged within the process chamber for supplying a process gas; and a plurality of electrodes arranged in the gas supply part and spaced apart from the circumferential surface of the rotary drum for receiving an electric power source and forming a plasma region wherein each of gaps between the electrodes and the rotary drum maintains the same range.</p> |
