BONDED SUBSTRATE STRUCTURE USING SILOXANE-BASED MONOMER AND METHOD OF FABRICATING THE SAME

摘要

A bonded substrate structure using a siloxane-based monomer and a manufacturing method thereof are disclosed. The disclosed bonded substrate structure using the siloxane-based monomer includes a siloxane-based monomer layer bonding a first substrate and a second substrate between the first substrate and the second substrate. The first substrate and the second substrate may be a silicon substrate or a silicone oxide substrate.