| 摘要 |
The present invention relates to an ultrasonic atomic force microscope. The ultrasonic atomic force microscope according to the present invention has a contact cantilever and a sample exciting part for vertically exciting samples with ultrasonic waves according to resonant frequency signals The present invention comprises: a controlling and driving part having a function generating part for exciting the cantilever and the sample exciting part by applying the resonant frequency signals to the cantilever and the sample exciting part, and a lock-in amplifying part for amplifying exciting signals generated in the cantilever and the sample exciting part; a displacement measuring part having a cantilever head part for measuring information on the displacement of the cantilever by detecting laser beams, reflected from the samples after irradiated from a laser focused on the surface of the cantilever, with displacement sensors arranged in multiples sections, and a cantilever driving part for maintaining the attachment force of the cantilever on the samples; and a microcomputer for controlling the operation of the controlling and driving part and the displacement measuring part, and generating the surface image of nanosamples, the elastic property image of the nanosample surface, the surface layer image of the nanosamples based on the exciting signals amplified by the lock-in amplifying part and the displacement information detected by the displacement measuring part. [Reference numerals] (120) Driving part;(130) Controlling part;(140) Head part;(210) Function generating part;(220) Lock-in amplifying part;(300) Samples;(400) Microcomputer |
