发明名称 |
Fluorine-Containing Compounds and Their Polymers Useful for Anti-Reflection Film Materials and Resist Compositions |
摘要 |
A fluorine-containing compound represented by the formula 1,;where R1 is a methyl group or trifluoromethyl group,each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond,l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, andwhen at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other. |
申请公布号 |
US2014171584(A1) |
申请公布日期 |
2014.06.19 |
申请号 |
US201414188154 |
申请日期 |
2014.02.24 |
申请人 |
Central Glass Company, Limited |
发明人 |
SUMIDA Shinichi;KOMORIYA Haruhiko;MAEDA Kazuhiko |
分类号 |
C08F20/30;C08F20/28;C09D133/16 |
主分类号 |
C08F20/30 |
代理机构 |
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代理人 |
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主权项 |
1. A polymer prepared by a polymerization or copolymerization using a fluorine-containing compound represented by formula 1, wherein R1 is a methyl group or trifluoromethyl group, R2 and R3 each independently represent a hydrogen atom or a group containing
(a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25, or(b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, m and n each independently represent an integer of 1-5 such that m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.
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地址 |
Ube-shi JP |