发明名称 |
PIEZOELECTRIC DEVICE AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE |
摘要 |
In a method for manufacturing a piezoelectric device while stably achieving strong bonding, a moisture-absorbing layer is formed on a bonding surface side of a piezoelectric single-crystal substrate. The moisture-absorbing layer is allowed to absorb moisture. A binder layer is formed on a bonding surface side of a supporting substrate. The moisture-absorbing layer is placed on the binder layer. A silica precursor in the binder layer is converted into silica through a hydrolysis reaction with moisture in the moisture-absorbing layer. |
申请公布号 |
US2014167565(A1) |
申请公布日期 |
2014.06.19 |
申请号 |
US201414183874 |
申请日期 |
2014.02.19 |
申请人 |
Murata Manufacturing Co., Ltd. |
发明人 |
IWAMOTO Takashi |
分类号 |
H01L41/08;H01L41/27 |
主分类号 |
H01L41/08 |
代理机构 |
|
代理人 |
|
主权项 |
1. (canceled)
|
地址 |
Nagaokakyo-shi JP |