发明名称 SILICON RECYCLING SYSTEM AND METHOD FOR THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To provide a silicon recycling system capable of recycling unprecedentedly abundant silicon from a silicon sludge discharged during a silicon slicing work and of forming silicon accompanied by scarce impurities led by carbon and oxygen and a method for the same.SOLUTION: The provided system comprises: a recovery device S20 for collecting a silicon sludge from an effluent discharged at the time of a silicon ingot slicing work; a microwave heating device S30 for heating the collected silicon sludge by applying microwave thereto; and a melting/solidifying device S40 for melting and unidirectionally solidifying the heated silicon sludge so as to form a silicon ingot. It becomes possible, furthermore, to recycle, by treating the silicon sludge with these devices in proper order, unprecedentedly abundant silicon accompanied by scarce impurities such as carbon, oxygen, etc.</p>
申请公布号 JP2014111519(A) 申请公布日期 2014.06.19
申请号 JP20130181863 申请日期 2013.09.03
申请人 PANASONIC CORP 发明人 NAGAI HISAO;YAMANISHI HITOSHI;AOKURA ISAMU;YAMADA YOSHIO
分类号 C01B33/02;C02F11/00;H01L31/04 主分类号 C01B33/02
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