IONIZING PUMP STAGE

摘要

The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.

主权项

1. An ionizing pump stage (10) comprising:
an inlet (12) for gases entering into the pump stage (10); an ionizing section (14) communicating with the inlet (12) in a gas-conductive manner and an ionizing device for ionizing a gas entered into the ionizing section (14); an acceleration device (20) for accelerating the ionized gas present in the ionizing section in a conveying direction of the gas; and a neutralizing section (18) following the ionizing section (14) in the conveying direction and communicating with the ionizing section (14) in a gas-conductive manner and a neutralizing device (24) for the electrical neutralizing of the ionized gas entering into the neutralizing section (18).