MASK INSPECTION APPARATUS AND METHOD OF CONTROLLING THE SAME

摘要

A mask inspection apparatus includes a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first direction, a displacement sensor unit configured to measure a distance to a sheet of the mask transferred by the mask transfer unit, a photographic unit configured to photograph the sheet of the mask transferred by the mask transfer unit, a control unit configured to send a height control signal for controlling a height of the photographic unit according to the measured distance, and a height control unit configured to control the height of the photographic unit according to the height control signal sent by the control unit.

主权项

1. A mask inspection apparatus comprising:
a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first direction; a displacement sensor unit configured to measure a distance to a sheet of the mask transferred by the mask transfer unit; a photographic unit configured to photograph the sheet of the mask transferred by the mask transfer unit; a control unit configured to send a height control signal according to the distance measured by the displacement sensor unit; and a height control unit configured to control the height of the photographic unit according to the height control signal sent by the control unit.