DUAL-DETECTION RESIDUAL GAS ANALYZER

摘要

A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector.

主权项

1. A detector in a residual gas analyzer (RGA), the detector configured to receive ions traveling in a downstream direction of a beamline, the detector comprising:
a) a steering electrode offset from the beamline; b) a first ion-receiving electrode arranged at least partly on the opposite side of the steering electrode from the beamline; c) a second ion-receiving electrode at least partly offset from the beamline and arranged at least partly across the beamline from at least a portion of the steering electrode and at least partially upstream of at least a portion of the steering electrode; d) a shielding electrode arranged at least partly between the beamline and the second ion-receiving electrode; and e) a source for applying a potential to the shielding electrode.