发明名称 |
DEPOSITION APPARATUS PROVIDING IMPROVED REPLACING APPARATUS FOR DEPOSITION RATE MEASURING SENSOR, AND REPLACING METHOD USING THE SAME |
摘要 |
A deposition apparatus includes a vacuum chamber, a sensor head located in the vacuum chamber and including a plurality of deposition rate measuring sensors, a sensor extractor coupled to the vacuum chamber and including a first vacuum maintaining valve, the sensor extractor being configured to extract one of the deposition rate measuring sensors to outside the vacuum chamber, and a sensor inserter coupled to the vacuum chamber and including a second vacuum maintaining valve, the sensor inserter being configured to insert one of the deposition rate measuring sensors into the sensor head. |
申请公布号 |
US2014165747(A1) |
申请公布日期 |
2014.06.19 |
申请号 |
US201313874371 |
申请日期 |
2013.04.30 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
Choi Eun-Sun |
分类号 |
G01D11/30 |
主分类号 |
G01D11/30 |
代理机构 |
|
代理人 |
|
主权项 |
1. A deposition apparatus comprising:
a vacuum chamber; a sensor head located in the vacuum chamber and comprising a plurality of deposition rate measuring sensors; a sensor extractor coupled to the vacuum chamber and comprising a first vacuum maintaining valve, the sensor extractor being configured to extract one of the deposition rate measuring sensors to outside the vacuum chamber; and a sensor inserter coupled to the vacuum chamber and comprising a second vacuum maintaining valve, the sensor inserter being configured to insert one of the deposition rate measuring sensors into the sensor head.
|
地址 |
Yongin-City KR |