AMPLIFIER-EMBEDDED PRESSURE SENSOR

摘要

An amplifier-embedded pressure sensor includes: a pressure-detecting element which detects the differential pressure between the fluid and the space where the pipe including a fluid passage of the fluid is installed, and outputs the pressure signal; an amplifier circuit board having an amplifier circuit for amplifying the pressure signal; a housing to which the pressure-detecting element is fixed; and a separation part which is fixed to the housing and separates a space inside the housing into a first space where the pressure-detecting element is disposed and a second space where the amplifier circuit board is disposed. The housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space.

主权项

1. An amplifier-embedded pressure sensor, which is connected to a pipe including a fluid passage, comprising:
a pressure-detecting unit which has a pressure-receiving surface in contact with a fluid flowing in from the pipe, and which detects a differential pressure between the fluid in contact with the pressure-receiving surface and a space where the pipe is installed and outputs a pressure signal; an amplifier circuit board which has an amplifier circuit for amplifying the pressure signal detected by the pressure-detecting unit; a housing to which the pressure-detecting unit is fixed; and a separation part which is fixed to the housing and separates a space inside the housing into a first space where the pressure-detecting unit is disposed and a second space where the amplifier circuit board is disposed, wherein the housing includes an inflow port for letting cooling gas for cooling the amplifier circuit board flow into the second space and a discharge port for discharging the cooling gas from the second space.