| 发明名称 |
TRANSPORT ARM, TRANSPORT APPARATUS AND TRANSPORT METHOD |
| 摘要 |
A transport arm including a holding unit that holds a substrate by vacuum adsorption. The holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port. The adsorption member is a squeeze packing. |
| 申请公布号 |
US2014169929(A1) |
申请公布日期 |
2014.06.19 |
| 申请号 |
US201314071060 |
申请日期 |
2013.11.04 |
| 申请人 |
Tokyo Ohka Kogyo Co., Ltd. |
发明人 |
Inao Yoshihiro;Kobari Satoshi;Nakamura Akihiko |
| 分类号 |
B25J15/06 |
主分类号 |
B25J15/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A transport arm that holds and transports a substrate, comprising a holding unit that holds the substrate by way of vacuum adsorption,
wherein the holding unit has an air discharge port and an adsorption member formed so as to surround the air discharge port, and wherein the adsorption member is a squeeze packing.
|
| 地址 |
Kawasaki-shi JP |
