发明名称 Method and apparatus for temperature control to improve low emissivity coatings
摘要 A method for making low emissivity panels, comprising cooling the article before or during sputter depositing a coating layer, such as a seed layer or an infrared reflective layer. The cooling process can improve the quality of the infrared reflective layer, which can lead to better transmittance in visible regime, block more heat transfer from the low emissivity panels, and potentially can reduce the requirements for other layers, so that the overall performance, such as durability, could be improved.
申请公布号 US2014166472(A1) 申请公布日期 2014.06.19
申请号 US201213714767 申请日期 2012.12.14
申请人 INTERMOLECULAR INC. 发明人 Ding Guowen;Boyce Brent;Hassan Mohd Fadzli Anwar;Le Minh Huu;Sun Zhi-Wen Wen;Wang Yu
分类号 C23C14/34 主分类号 C23C14/34
代理机构 代理人
主权项 1. A method for making a coated article, the method comprising providing a transparent substrate, wherein the substrate comprises a first layer,wherein the first layer comprises at least one of an index of refraction between those of the transparent substrate and air, anda crystal orientation enabling an (111) crystal orientation of silver; cooling the transparent substrate before bringing the transparent substrate to a sputter deposition chamber; sputter depositing a second layer on the first layer.
地址 San Jose CA US