| 摘要 |
PROBLEM TO BE SOLVED: To exhaust spray to the outside with a simple configuration without forcibly exhausting the spray generated during cleaning.SOLUTION: A cleaning device (1) includes: a holding table (4) which holds a plate-shaped work-piece (W); a cleaning nozzle (5) which jets washing water toward the plate-shaped work-piece (W); and a table cover (3) which covers the periphery of the holding table (4). In the table cover (3), a bottom plate (31) having a plurality of holes (33) is arranged around the holding table (4), and a sheet-shaped net (35) is laid on the bottom plate (31). |
