INTEGRATED CIRCUIT ARRANGEMENT, DEVICE AND GAS DETECTION METHOD

摘要

An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.

主权项

1. An integrated circuit arrangement comprising:
a substrate; and a gas sensor comprising: at least a pair of spatially separated electrodes including an excitation electrode and a sensing electrode; a volume in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator conductively or capacitively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal including a resonance frequency of said reaction product; and a signal detector conductively or capacitively coupled to the sensing electrode and adapted to detect a change in said microwave signal at said resonance frequency caused by a permittivity change in said volume, said permittivity change being caused by the presence of said reaction product.