| 摘要 |
The present invention relates to a FOUP purge apparatus. A FOUP purge apparatus according to the present invention includes a shelf part which supports a FOUP; and a purge gas circulation part which supplies a purge gas to the shelf part and collects the purge gas from the shelf part. Therefore, according to the present invention, the corrosion of peripheral equipment and sensors can be prevented even when the FOUP is open. A purge process can be performed on multiple FOUPs at once as a purge process is performed when the FOUP is waiting on the shelf part. |
