METHOD OF PRODUCING COIL, COIL SET, COIL-RELATED DEVICE USED IN VAPOR DEPOSITION SYSTEM, COIL, COIL SET, AT LEAST ONE COIL-RELATED DEVICE OR THEIR COMBINATION AND METHOD OF PRODUCING COIL, COIL SET OR COIL-RELATED DEVICE USED IN VAPOR DEPOSITION SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide at least one coil, at least one coil set, at least one coil-related device or their combination used in a vapor deposition system which has better uniformity, cleanness and strength while retaining roughness requirements and regeneration functions.SOLUTION: The surface of at least one coil, at least one coil set, at least one coil-related device or their combination is not subjected to a surface-roughening technique such as bead blasting, and a specified pattern is formed in at least a part of the surface by a pattern formation tool. The specified pattern has a constant depth of 0.350 mm or greater and includes a diamond pattern, a cross hatch pattern or their combination.