| 摘要 |
An improved electroacoustic component is provided. The component comprises a carrier wafer with a passivation layer, a piezoelectric layer above the passivation layer and an interdigitated transducer in an electrode layer on the piezoelectric layer. The component is designated to work with a shear mode or a higher order Lamb mode. Preferred parameter values of the component are also provided. The piezoelectric layer is preferably lithium niobate with a y-cut angle between 50Q and 60Q, preferably 52Q or 55Q, and a thickness of about one μι&eegr; or less. The piezoelectric layer is preferably lithium tantalate with a y-cut angle between 45Q and 60Q, preferrably 48Q degrees and a thickness of about one μι&eegr; or less. A finite element simulation method for determining optimized parameters of electroacoustic components is also provided, notably including the step of neglecting thermo-differential stress in at least one direction. |
