SENSOR ELEMENT AND COMPOSITE SENSOR

摘要

On the detection base section (220E1) side of a movable-side detection base section (240D1), a plurality of protruding sections (241D1) are formed by being aligned with each other in the longitudinal direction. On the detection base section (220F1) side of the detection base section (240D1), a plurality of protruding sections (242D1) are formed by being aligned with each other in the longitudinal direction. On the detection base section (240D1) side of a fixed-side detection base section (220E1), a plurality of protruding sections (221F1) are formed by being aligned with each other such that the protruding sections partially face the protruding sections (242D1). On the detection base section (240D1) side of a fixed-side detection base section (220F1), a plurality of protruding sections(221F1) are formed by being aligned with each other such that the protruding sections partially face the protruding sections (241D1). On an end section of the detection base section (240D1), said end section being on the inner frame (101A) side, a capacitance forming section (243D1) is formed.