DOOR VALVE WITH EMBEDDED CAM

摘要

The present invention relates to a door valve. More specifically, the door valve with a built-in cam installed in a cylinder to guide the lifting and reciprocating movement of a door plate to open or close the door plate to seal a chamber to maintain a vacuum in the chamber after a wafer entered and exited various chambers used in a vacuum in semiconductor processing. Accordingly, the door valve driving the door plate can be more compact and minimize the abrasion of the cam.