COMPOUND-BASED THIN FILM SOLAR CELL AND MANUFACTURING METHOD OF THE SAME

摘要

PROBLEM TO BE SOLVED: To manufacture a compound-based thin film solar cell having high photoelectric conversion efficiency.SOLUTION: A compound thin film solar cell manufacturing method comprises: forming a first electrode layer (2) on a substrate (1); forming a compound-based p-type light absorption layer (3) on the first electrode layer (2); forming a CdS-based buffer layer (4A) on the p-type light absorption layer (3); subsequently annealing the substrate (1) including the CdS-based buffer layer (4A) in an oxygen-containing atmosphere; forming an InS-based buffer layer (4B) on the CdS-based buffer layer (4A) after annealing; and subsequently forming a second electrode layer (5).