THIN FILM PIEZOELECTRIC ELEMENT, THIN FILM PIEZOELECTRIC ACTUATOR, AND THIN FILM PIEZOELECTRIC SENSOR, AND HARD DISC DRIVE, AND INK JET PRINTER

摘要

PROBLEM TO BE SOLVED: To provide a thin film piezoelectric element capable of obtaining a larger amount of displacement, while reducing the dielectric loss of a piezoelectric thin film composed of a non-lead piezoelectric material composing the thin film piezoelectric element.SOLUTION: In a thin film piezoelectric element 100 having a piezoelectric thin film 3, and a pair of electrode films 1, 5 arranged while sandwiching the piezoelectric thin film 3, the piezoelectric thin film 3 has an alkali niobium oxide-based perovskite structure represented by a composition formula (KNaSr)(NbZr)O, and is oriented preferentially to (001). Following relations are satisfied: 0.95≤m<1.05, 0.6≤(m x/y)≤0.8.