MASK MANAGEMENT SYSTEM AND METHOD FOR OLED ENCAPSULATION

摘要

A system and method for encapsulating an organic light-emitting diode (OLED) device by enabling a substrate and a plurality of masks to be efficiently received into a vacuum processing environment, transferred between one or more process chambers for the deposition of encapsulating layers, and removed from the processing system. A method of encapsulating an organic light-emitting diode (OLED) device includes positioning one or more masks over a substrate to deposit encapsulating layers on an OLED device disposed on the substrate. A processing system for encapsulating an organic light-emitting diode (OLED) device includes one or more transfer chambers, one or more load lock chambers coupled to each transfer chamber and operable to receive a mask into a vacuum environment, and one or more process chambers coupled to each transfer chamber and operable to deposit an encapsulating layer on a substrate.

主权项

1. A method of encapsulating an organic light-emitting diode (OLED) device, comprising:
positioning a first mask over a substrate, the first mask having a first size; depositing a first encapsulating layer on an OLED device disposed on the substrate with the first mask; positioning a second mask over the substrate, the second mask having a second size; depositing a buffer layer on the first encapsulating layer and the OLED device with the second mask; positioning a third mask over the substrate, the third mask having a size equal to the first size; and depositing a second encapsulating layer on the buffer layer, the first encapsulating layer, and the OLED device with the first mask.