| 发明名称 |
Substrate Carrier |
| 摘要 |
A substrate carrier is provided. The substrate carrier includes a base for supporting a substrate. A plurality of support tabs is affixed to a surface of the base. The plurality of support tabs have a cavity defined within an inner region of each support tab of the plurality of support tabs. A plurality of protrusions extends from the surface of the base, wherein one of the plurality of protrusions mates with one cavity to support one of the plurality of support tabs. A film is deposited over the surface of the base, surfaces of the plurality of support tabs and surfaces of the plurality of protrusions. |
| 申请公布号 |
US2014166840(A1) |
申请公布日期 |
2014.06.19 |
| 申请号 |
US201213716044 |
申请日期 |
2012.12.14 |
| 申请人 |
INTERMOLECULAR, INC. |
发明人 |
French Wayne R.;Child Kent Riley;Collins Alonzo T.;Dedontney Jay B.;Endo Richard R.;Francis Aaron T.;Fresco Zachary;Haywood Edward L.;Lacey Ashley David;Mathur Monica Sawkar;Tsung James;Wang Danny;Williams Kenneth A.;Zhao Maosheng |
| 分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A substrate carrier, comprising:
a base for supporting a substrate; a plurality of support tabs affixed to a surface of the base, the plurality of support tabs having a cavity defined within an inner region of each support tab of the plurality of support tabs; a plurality of protrusions extending from the surface of the base, wherein one of the plurality of protrusions mates with one of the cavities to support one of the plurality of support tabs; and a film deposited over the surface of the base, surfaces of the plurality of support tabs, and surfaces of the plurality of protrusions.
|
| 地址 |
San Jose CA US |
