发明名称 |
APPARATUS AND METHOD FOR OPTICAL INSPECTION, MAGNETIC FIELD AND HEIGHT MAPPING |
摘要 |
A metrology system is configured to provide visual inspection of a workpiece, three-dimensional magnetic field map, and height measurement. A stage is configured to bring points of interest at the workpiece under the desired tool for measurement. The optical field, magnetic field, and height information can be used independently or together in order to correlate defects in the manufacturing process of the workpiece. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. |
申请公布号 |
WO2014093730(A1) |
申请公布日期 |
2014.06.19 |
申请号 |
WO2013US74839 |
申请日期 |
2013.12.12 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
GERLING, JOHN;WAGNER, EDWARD;NASSER-GHODSI, MEHRAN;PICKARD, GARRETT;PLETTNER, TOMAS;SEARS, CHRISTOPHER;HAYNES, ROBERT |
分类号 |
G01N21/956;G01B7/28;G01B11/24 |
主分类号 |
G01N21/956 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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