发明名称 INTEGRATED DEVICE AND METHOD FOR FABRICATING THE INTEGRATED DEVICE
摘要 The invention relates to the field of fabricating a semiconductor integrated circuit and particularly to an integrated device and a method for fabricating the integrated device in order to address the problem that a drift area is fabricated on an epitaxial layer but the application scope of the LDMOS is limited due to the costly process of fabricating the epitaxial layer. An integrated device of an nLDMOS and a pLDMOS according to an embodiment of the invention includes a substrate and further includes an nLDMOS and a pLDMOS, where the nLDMOS and the pLDMOS are located in the substrate. The nLDMOS and the pLDMOS is located in the substrate without any epitaxial layer, thereby lowering the fabrication cost and extending the application scope.
申请公布号 US2014167158(A1) 申请公布日期 2014.06.19
申请号 US201314092719 申请日期 2013.11.27
申请人 FOUNDER MICROELECTRONICS INTERNATIONAL CO., LTD. ;PEKING UNIVERSITY FOUNDER GROUP CO., LTD. 发明人 PAN Guangran;WEN Yan;SHI Jincheng;GAO Zhenjie
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
代理机构 代理人
主权项 1. An integrated device, comprising a substrate, wherein the integrated device further comprises an N-channel Laterally Double-diffused Metal Oxide Semiconductor field effect transistor, nLDMOS, and a P-channel Laterally Double-diffused Metal Oxide Semiconductor field effect transistor, pLDMOS, wherein the nLDMOS and the pLDMOS are located in the substrate.
地址 Shenzhen CN