| 摘要 |
Provided is an airflow sensor which is equipped with: a heat-sensitive measurement element disposed inside an air duct in which a gas to be measured circulates; and a support mechanism for supporting the heat-sensitive measurement element inside the air duct. The heat-sensitive measurement element is provided with: an insulating film; a thin-film thermistor part formed on a surface of the insulating film, using a thermistor material; a pair of comb electrodes which have a plurality of comb teeth, and which are formed facing each other and from metal, as patterns upon the thin-film thermistor part; and a pair of pattern electrodes which are connected to the pair of comb electrodes, and which are formed as patterns on the surface of the insulating film. The support mechanism is disposed such that the planar direction of the insulating film is parallel to the direction of airflow in the air duct. |
