| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transport robot, a housing, a semiconductor manufacturing device, and a sorter device capable of preventing an increase in the size of the housing and a reduction in cleanliness.SOLUTION: In a transport robot that includes: a body including a lifting mechanism; a slide cover sealing a gap generated in the body as the lifting mechanism operates; a first arm horizontally rotatable on the body; a second arm horizontally rotatable on a tip end of the first arm; and a hand horizontally rotatable on a tip end of the second arm, and that transports a substrate mounted on the hand, a lifting shaft of the lifting mechanism is offset from a first arm rotational shaft that is a rotational shaft of the first arm in a plan view, and the lifting shaft is within a revolving range of the first arm and on a symmetrical line of the revolving range if the revolving range of the first arm has a fan shape.</p> |
