METHOD FOR MANUFACTURING RIDGE-TYPE WAVEGUIDE

摘要

In a method for manufacturing a ridge-type waveguide, a substrate is provided. An etching resistance stripe is coated on the substrate. The substrate with the etching resistance stripe is subjected to a wet etching process to form a ridge under the etching resistance stripe. The etching resistance stripe is removed. A titanium stripe is then coated onto the ridge and diffused into the ridge to form a waveguide in the ridge by a high temperature diffusing process.

主权项

1. A method for manufacturing a ridge-type waveguide, the method comprising:
providing a substrate; coating an etching resistance stripe on the substrate; dipping the substrate with the etching resistance stripe into a first etchant to form a ridge under the etching resistance stripe using a first wet etching process; removing the etching resistance stripe; coating a titanium stripe on the ridge; and diffusing the titanium stripe into the ridge to form a waveguide in the ridge by a high temperature diffusing process.