| 摘要 |
<p>This sensor element (1) is provided with a first mass (10) and a second mass (20) that oscillate in anti-phase to each other. The first and second masses (10, 20) are each provided with an acceleration detection unit and an angular velocity detection unit. The acceleration detection unit and angular velocity detection unit are formed at the first and second masses (10, 20) in a manner so that changes in capacitance stemming from the acceleration (a) in a first detection signal obtained from the first and second masses (10, 20) and changes in capacitance stemming from the acceleration (a) in a second detection signal obtained from the first and second masses (10, 20) in the same manner are in phase and at the same level, and changes in capacitance stemming from the angular velocity (ω) in the first detection signal obtained from the first and second masses (10, 20) and changes in capacitance stemming from the angular velocity (ω) in the second detection signal obtained from the first and second masses (10, 20) in the same manner are in anti-phase and at the same level.</p> |
