发明名称 |
A MICROMECHANICAL RESONATOR |
摘要 |
The invention relates to a micromechanical resonator comprising a substrate (1) of first material (2), a resonator (3) suspended to the supporting structure (1), the resonator (3) being at least partially of the same material (2) as the supporting structure and dimensioned for resonation at a specific frequency f0, coupling means (5) for initiating, maintaining and coupling the resonation of the resonator (3) to an external circuit (6), and the resonator (3) including second material (4), the thermal properties of which being different from the first material (2). In accordance with the invention the resonator (3) includes the second material (4) located concentrated in specific places of the resonator (3). |
申请公布号 |
EP2484008(A4) |
申请公布日期 |
2014.06.18 |
申请号 |
EP20100821619 |
申请日期 |
2010.09.27 |
申请人 |
TEKNOLOGIAN TUTKIMUSKESKUS VTT |
发明人 |
OJA, AARNE;PENSALA, TUOMAS;MELTAUS, JOHANNA |
分类号 |
H03H9/02;B81B3/00;B81B7/00;H03H3/007;H03H3/013;H03H3/02;H03H9/24 |
主分类号 |
H03H9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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