| 摘要 |
Disclosed are a light irradiation device for exposure devices, a method for controlling turn-on of the same, an exposure device, an exposure method, and a substrate all enabling reduction of the replacement times of the light source units and the downtime of the device. The light irradiation device (80) is provided with a plurality of light source units (73) each including a lamp (71) and a reflecting mirror (72) for giving directivity to the light emitted from the lamp (71) and outputting the light, a plurality of cassettes (81) to which a prescribed number of light source units (73) can be attached, and a supporter (82) to which the cassettes (81) can be attached. |
