Vacuum chamber for processing semiconductor wafers

摘要

The vacuum chamber comprises a frame 1 on which interchangeable modular panels 10a can be attached. The vacuum chamber provides easy reconfiguration of processing systems to adapt the provision and/or the positions of processing components such as evaporation sources, ion sources, etc which are attached to the panels. The chamber may have a hexagonal shape to facilitate the assembly of an interconnected cluster of vacuum chambers.