| 摘要 |
<p>The present invention relates to a method for preparing fine ruthenium powder having higher purity from a waste ruthenium target, wherein the object of the method is to overcome the disadvantages of using conventional wet preparation methods for preparing powder, including high costs and long preparation time due to a complicated preparation process, and environmental problems for treating waste water with acids. In order to address the problems, the present invention provides a method comprising the following steps: chemically or physically removing contaminant sources on the surface of a waste ruthenium target; mounting the surface-treated waste ruthenium target on the interior of a plasma chamber and controlling a plasma torch; reducing pressure using a vacuum device and forming a plasma; preparing a powder having higher purity; and fine-grinding the powder to obtain fine ruthenium powder having higher purity.</p> |
