| 摘要 |
Disclosed is a spin head. The spin head includes a body on which a substrate is laid; positioning pins and push pins protruding upward from the body; and a chuck pin moving unit moving the positioning pins and the push pins between a support position supporting a lateral portion of the substrate laid on the spin head and a standby position far away from the center of the body relative to the support position. The chuck pin moving unit has moving rods fixed to the positioning pins and the push pins, a rotary cam formed on an outer surface thereof with protrusions moving the moving rods to move the positioning pins and the push pins which are positioned at the support position to the standby position, and a resilient member applying the resilient force to each of the moving rods to independently move the positioning pins and the push pins from the standby position toward the support position. The resilient member has first resilient members having a first resilient coefficient to apply the resilient force to the moving rods connected to the push pins, and second resilient members having a second resilient coefficient higher than the first resilient coefficient to apply the resilient force to the moving rods connected to the positioning pins. |
