发明名称
摘要 PROBLEM TO BE SOLVED: To provide a diamond single crystal suitable for mechanical applications such as a cutting tool and a wear-resistant tool, and functional applications such as a semiconductor material, an electronic component and an optical component, and to provide a method for producing the diamond single crystal. SOLUTION: The diamond single crystal shows a peak absorption coefficient of 0.05 to 10 cm<SP POS="POST">-1</SP>at a wavenumber of 1,332 cm<SP POS="POST">-1</SP>(wavelength of 7.5μm) over the entire crystal, and is obtained by a chemical vapor deposition method. The single crystal is obtained by adjusting composition ratios of elements in a vapor phase at the chemical vapor deposition of the single crystal to be carbon atom concentration with respect to a hydrogen atom of 2 to 10%, nitrogen atom concentration with respect to a carbon atom of 0.1 to 6%, and oxygen atom concentration with respect to a carbon atom of 0.1 to 5%. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5527628(B2) 申请公布日期 2014.06.18
申请号 JP20120088284 申请日期 2012.04.09
申请人 发明人
分类号 C30B29/04;C01B31/06;H01L21/205 主分类号 C30B29/04
代理机构 代理人
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